Sr.#

Items

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Permanent Equipment

1

Growth Chamber (Stainless Steel SS-316) Size dia. 30cm, double skinned for water cooling and also a water cooled top opening door. The door should include a quartz window for temperature measurement and general observation. Inside, positioned s substrate holder. The substrate holder should be made from high purity (low dust content) graphite. This is inductively heated with a 3kw 13.56Mhz RF generator and impedance matching (Dressler Germany ).

1

2

Turbo Molecular Pumps (2300 l/s turbo)

1

3

Roughing Pump rough pumping Leybold SC15D 15m³h^-1 dry scroll pump

1

4

Vacuum gauging including a combination gauge controller (Type 937),

2

5

2 Pirani gauges

2

6

A cold cathode high vacuum gauge. The switching on and off of the cold cathode gauge should be automatic  

1

7

Mass flow controlled gas channels, 3 of them housed in a sealed and vented gas box. These include individual Nupro isolation valves. The 4^th channel is a pre-cursor bubbler system with heated gas lines etc.  

4

8

PID temperature control with either a platinum resistance thermometer or an optical pyrometer as the feedback element

1

9

RF generator and impedance matching (Dressler Germany) inductively heated with a 3kw 13.56Mhz. with Chiller system

1

10

He-closed cycle Cryostat

1

11

DLS spectrometer 83D

1